Title:
EVAPORATION SOURCE FOR LITHIUM
Document Type and Number:
Japanese Patent JP3758253
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To develop a device for a lithium evaporation source in which a crucible is not reacted with lithium and, also, its production is easily executable by making the wide wall of a crucible as a vapor depositing source for lithium of stainless steel and making the bottom part of mica.
SOLUTION: Lithium L is chared into a bottomed cylindrical crucible 12 in which the side wall is made of stainless steel and the bottom part is made of mica as a vapor depositing source 10 for heating, melting and evaporating lithium and vapor-depositing thin coating of lithium on the surface to be vapor- deposited, and the outside is surrounded by a heater 94 composed of a cylindrical body 941 made of quartz provided with exothermic resistance wire 942. This exothermic resistance wire 942 is energized to heat, melt and evaporate lithium L. The device in which lithium is not short-circuited by erosion caused by its reaction with the crucible 12, the service life of the crucible 12 is prolonged, the production of the crucible itself is made easy, and it has excellent performance as a lithium evaporation source is developed.
Inventors:
Yasumitsu Ito
Masaaki Isai
Masaaki Isai
Application Number:
JP26794896A
Publication Date:
March 22, 2006
Filing Date:
September 18, 1996
Export Citation:
Assignee:
SUZUKI KABUSHIKI KAISHA
International Classes:
C23C14/24; F27B14/10; (IPC1-7): C23C14/24; F27B14/10
Domestic Patent References:
| JP63038570A | ||||
| JP58213873A | ||||
| JP57207172A | ||||
| JP9272966A | ||||
| JP7135081A | ||||
| JP5039565A | ||||
| JP4249535A | ||||
| JP4505478A | ||||
| JP60093755U | ||||
| JP52066883U |
Attorney, Agent or Firm:
Isamu Takahashi
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