蒸発抑制部材、単結晶引き上げ装置、および、シリコン単結晶の製造方法

Title:

蒸発抑制部材、単結晶引き上げ装置、および、シリコン単結晶の製造方法

Document Type and Number:

Japanese Patent JP6610529

Kind Code:

B2

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Inventors:

Ogawa Fussa
Narushima Yasuto
Koichi Maekawa
Yasushi Kawakami

Application Number:

JP2016249503A

Publication Date:

November 27, 2019

Filing Date:

December 22, 2016

Export Citation:

Assignee:

Sumco inc.

International Classes:

C30B29/06; C30B15/00; F27B14/08

Domestic Patent References:

Attorney, Agent or Firm:

Intellectual Property Office

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