To improve quality by enabling presence/absence of wire non-delivery between a MEMS chip GND and a substrate GND to be detected in 100% in a MEMS microphone and performing screening.
In order to detect presence/absence of non-delivery of a MEMS chip GND wire 7 in a MEMS microphone 2 installed in a contact socket 1, AC driven light is emitted from a high-output LED 3 and two factors are utilized where a microphone output level of an AC drive frequency is increased and a noise level is increased in the MEMS microphone under presence/absence of non-delivery of the MEMS chip GND wire 7, thereby enabling detection as a mass-product machine. Furthermore, since a method of the detection is similar to a conventional property examination, simultaneous examinations of property examination and wire examination are enabled by generating a three-wave mixed wave from a speaker 4 simultaneously with light emission.
Toshimitsu Ichikawa
Kimihide Hashimoto