EXAMINATION DEVICE FOR MOUNTED PRINT SUBSTRATE

Japanese Patent JP3203851

B2

PURPOSE: To examine the mounting condition of parts over a wide range quickly and precisely without spreading a light intercepting area of a photoelectric transfer element and without causing any change in the characteristics depending on the scanning position of a trigonometrical survey in a mounting condition examination device which scans a surface of a mounted print substrate by microbeam and detects its reflected light from plural directions so as to examine the mounting condition.
CONSTITUTION: A radiated microbeam from a light source 1 scans a surface of a mounted print substrate 6 approximately vertically by a polygon mirror 3 and a light projecting fθ lens 5. Optical path correction optical systems 7, 8, 9 intercept the scattering reflected light form the mounted print substrate 6 to correct these optical paths. Correction is carried out so that the fixed directional vector reflected light is intercepted no matter how the microbeam scanning position changes and is led to the interception position on the photoelectric transfer elements 19, 20, 21, 22 according to the height of the scanning position.

Norio Mochida
Tomohiro Kimura
Osamu Yamada
Yuji Ono
Hidenori Nagata

JP810593A

August 27, 2001

January 21, 1993

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Matsushita Electric Industrial Co., Ltd

G01B11/24; G01B11/245; G01C3/06; G01N21/88; G01N21/956; G02B26/10; G02B26/12; H05K13/08; (IPC1-7): G01B11/24; G01N21/956; G02B26/10; H05K13/08

JP45508A
JP4352287A
JP2259503A
JP62254003A
JP63138991U

Fumio Iwahashi (2 others)

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