Title:
交換結合膜及び前記交換結合膜を用いた磁気検出素子
Document Type and Number:
Japanese Patent JP4189146
Kind Code:
B2
Abstract:
A seed layer is formed containing Cr and an element X (wherein the element X is Fe, Ni, etc.) on a substrate layer formed from Ta, etc. At this time, the compositional ratio of the aforementioned Cr is specified to be 80 at % or more, and the seed layer is formed to have a film thickness of 20 Å or more, but 130 Å or less. According to this, the wettability of the seed layer surface can be improved remarkably compared to that heretofore attained, the unidirectional exchange bias magnetic field and rate of resistance change in the fixed magnetic layer can be increased, and it becomes possible to make the smoothness of the surface of each layer on the aforementioned seed layer excellent.
Inventors:
Kenichi Tanaka
Masamichi Saito
Naoya Hasegawa
Masamichi Saito
Naoya Hasegawa
Application Number:
JP2001348557A
Publication Date:
December 03, 2008
Filing Date:
November 14, 2001
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
International Classes:
H01L43/08; H04N7/14; B82Y10/00; B82Y15/00; B82Y25/00; G01R33/09; G11B5/39; H01F10/32; H01F41/30; H04N7/173
Domestic Patent References:
| JP200076628A | ||||
| JP2000156530A | ||||
| JP1174121A | ||||
| JP200031562A | ||||
| JP2001102215A |
Attorney, Agent or Firm:
野▲崎▼ 照夫