Title:
EXCIMER LAMP DEVICE
Document Type and Number:
Japanese Patent JP3938010
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an excimer lamp device easy to handle when mounting on an irradiation device, formed by arranging a plurality of almost rod-shaped excimer lamps with double tube structure of which scatter of illuminance of individual excimer lamps are reduced and the illuminance in longitudinal direction is uniformized wherever practicable.
SOLUTION: In the excimer lamp device composed of a plurality of rod-shaped excimer lamps, the excimer lamp is formed into a double tube structure composed of an outer tube with large diameter and an inner tube with small diameter, having one electrode at the outside of the outer tube, and the other electrode at the inside of the inner tube, sealing discharge gas between the outer tube and the inner tube. The excimer lamp device has a supporting stand on which respective excimer lamps are arranged and supported, and respective excimer lamps are integrally connected in longitudinal direction by being fixed to the supporting stand by fixing members.
More Like This:
| JP2003123630 | DISCHARGE LAMP DEVICE |
| JP2007273335 | FLUORESCENT LAMP |
Inventors:
Noritaka Takezoe
Kenichi Hirose
Kenichi Hirose
Application Number:
JP2002314665A
Publication Date:
June 27, 2007
Filing Date:
October 29, 2002
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01J5/48; H01J65/00; (IPC1-7): H01J65/00; H01J5/48
Domestic Patent References:
| JP3201358A | ||||
| JP4230950A | ||||
| JP9274893A | ||||
| JP2000223078A |
Attorney, Agent or Firm:
Tsutomu Igarata