To provide a structure, in an excimer lamp comprising a long arc tube having a sealed space with inert gas sealed therein, an external electrode disposed on the outer surface of the arc tube and an internal electrode disposed inside the arc tube, with an external lead and a power feeding lead protruding from the internal electrode to outside the arc tube connected with a power feeding terminal, which, when the power feeding lead is disposed eccentrically with respect to the external lead, prevents the power feeding lead from being broken or glass in a sealed section from being damaged by a movement in an axial direction of the power feeding lead, and also prevents a junction with the power feeding terminal connecting the power feeding lead and the external lead from coming off.

The structure is characterized in that a power feeding lead is disposed eccentrically with respect to an external lead of an arc tube, and that a power feeding terminal connecting the power feeding lead and the external lead is bent in rounded zigzag form.