Title:
半導体製造装置の排ガス除害装置
Document Type and Number:
Japanese Patent JP4342427
Kind Code:
B2
Inventors:
Keishi Imamura
Application Number:
JP2004346688A
Publication Date:
October 14, 2009
Filing Date:
November 30, 2004
Export Citation:
Assignee:
Kanken Techno Co., Ltd.
International Classes:
H01L21/205; B01D53/46; B01D53/68
Domestic Patent References:
| JP11188231A | ||||
| JP2002186828A | ||||
| JP11008200A | ||||
| JP3215081B2 | ||||
| JP11319485A |
Attorney, Agent or Firm:
Yoshiaki Mori