Title:
EXHAUST GAS RECYCLING AND CIRCULATING APPARATUS
Document Type and Number:
Japanese Patent JP3918525
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an exhaust gas recycling and circulating apparatus in which the exhaust gas is highly treated by a simple and low cost system.
SOLUTION: The exhaust gas 21 flows into a waste gas regeneration apparatus 3 through a liquid chemical mist removing and recovering apparatus constituted of a liquid chemical mist removing apparatus main filter. Cleaned air is obtained in the waste gas regeneration apparatus 3 by passing the waste gas through the liquid chemical recovering apparatus 4 constituted of three units of the main filter 12, a filling type cooler 13, and a post filter 18, passing through a wet type gas removing apparatus 5 using a hydrophilic porous body 19 as a filler, and after that, passing through a high treatment apparatus 6 constituted of a heating coil 7, a dry type gas removing apparatus 8, and a HEPA filter 9. The cleaned air is supplied to a clean room.
Inventors:
Yoshinobu Suzuki
Takeshi Shiratani
Kazuo Shimizu
Takeshi Shiratani
Kazuo Shimizu
Application Number:
JP2001356615A
Publication Date:
May 23, 2007
Filing Date:
November 21, 2001
Export Citation:
Assignee:
Shimizu Construction Co., Ltd.
International Classes:
B01D53/34; F24F3/16; B01D39/16; B01D39/20; B01D50/00; B01D51/00; B01D51/02; B01D51/10; B01D53/77; (IPC1-7): B01D53/34; B01D39/16; B01D39/20; B01D50/00; B01D51/00; B01D51/02; B01D51/10; B01D53/77; F24F3/16
Domestic Patent References:
| JP10205822A | ||||
| JP56168229U | ||||
| JP7328380A | ||||
| JP2001299884A | ||||
| JP2000320865A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama