Title:
EXHAUST GAS TREATING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2008207139
Kind Code:
A
Abstract:
To resolve problems in an increasing tendency of PFC amount flowing into a PFC decomposition apparatus following the market growth in the semiconductor or liquid crystal manufacturing fields, wherein, when decomposing a large flow amount of PFC by a catalyst, the performance of the catalyst becomes low and the durability is deteriorated, unless the active points of the catalyst are effectively used.
Increase of a linear speed of gas passing through a catalyst layer diffuses gas into fine pores of the catalyst to effectively use the active points of the catalyst, thus decreasing reaction load of each active point, enhancing the PFC decomposition performance and durability of the catalyst.
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Inventors:
SASAKI TAKASHI
SUGANO SHUICHI
SUGANO SHUICHI
Application Number:
JP2007048386A
Publication Date:
September 11, 2008
Filing Date:
February 28, 2007
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B01D53/86; B01D53/68
Domestic Patent References:
JPH04313344A | 1992-11-05 | |||
JPH0663357A | 1994-03-08 | |||
JPH0910553A | 1997-01-14 | |||
JPH03106419A | 1991-05-07 | |||
JP2006314905A | 2006-11-24 | |||
JPH0290921A | 1990-03-30 | |||
JPH10263363A | 1998-10-06 | |||
JPH07116507A | 1995-05-09 | |||
JPH07171342A | 1995-07-11 | |||
JPH07171343A | 1995-07-11 |
Attorney, Agent or Firm:
Manabu Inoue
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