Title:
排気システム
Document Type and Number:
Japanese Patent JP6616611
Kind Code:
B2
Abstract:
The present invention provides an exhausting system capable of preventing gas condensation and early overheat in a vacuum pump without causing an increase in the costs of the entire exhausting system and is suitable for relaxing the operable conditions of the entire exhausting system including a flow rate at which gas is successively exhausted. An exhausting system is predicated on a constitution including: at least as two vacuum pumps, a first vacuum pump and a second vacuum pump connected in series; and a connecting portion disposed therebetween, the exhausting system exhausting gas containing a condensable gas via the vacuum pumps and the connecting portion. In the exhausting system, an environment inside the connecting portion is set an environment included in a vapor phase region below a vapor pressure curve of the condensable gas flowing through an inside of the connecting portion by providing the second vacuum pump near the first vacuum pump to set.
Inventors:
Takeshi Kabazawa
Manabu Nonaka
Manabu Nonaka
Application Number:
JP2015145473A
Publication Date:
December 04, 2019
Filing Date:
July 23, 2015
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04B37/16; F04C25/02; F04D19/04
Domestic Patent References:
| JP4019393B2 | ||||
| JP9310696A | ||||
| JP63046717Y1 | ||||
| JP6012794U | ||||
| JP2005120955A | ||||
| JP9219172A |
Foreign References:
| WO2012046495A1 |
Attorney, Agent or Firm:
Shigenori Wada
Hidehiko Komatsu
Hidehiko Komatsu