Title:
EXPANDING METHOD AND EXPANDING DEVICE
Document Type and Number:
Japanese Patent JP2022178915
Kind Code:
A
Abstract:
To make it possible to inhibit a tape from being peeled from a frame.SOLUTION: An expanding method comprises an expanding step 1001 of expanding a tape by pinching the tape using pinching members and separating the pinching members from each other, a frame mounting step 1005 of pasting a frame having an opening on the tape and cutting the tape along the frame: a suction holding step 1002 of sucking and holding a tape's region corresponding to an inner side of the opening of the frame in a state of expanding the tape pinched by the pinching members, before performing the frame mounting step 1005 after performing the expanding step 1001; and an outside extension releasing step 1003 of releasing extension of the outside of the region while keeping extension of the tape's region by making the pinching members move so as to be closer to each other, before performing the frame mounting step 1005 after performing the suction holding step 1002.SELECTED DRAWING: Figure 5
Inventors:
CHEN YEH
Application Number:
JP2021086044A
Publication Date:
December 02, 2022
Filing Date:
May 21, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; H01L21/683
Attorney, Agent or Firm:
Sakai International Patent Office
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