Title:
露光装置及び露光方法、デバイス製造方法
Document Type and Number:
Japanese Patent JP5445612
Kind Code:
B2
Inventors:
Hiroyuki Nagasaka
Hiroaki Takaiwa
Shigeru Hirukawa
Hiroaki Takaiwa
Shigeru Hirukawa
Application Number:
JP2012083221A
Publication Date:
March 19, 2014
Filing Date:
March 30, 2012
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20; H01L21/683
Domestic Patent References:
| JP2005019864A | ||||
| JP2005150734A | ||||
| JP2004289127A | ||||
| JP2005005707A | ||||
| JP10303114A | ||||
| JP11176727A |
Foreign References:
| WO1999049504A1 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Previous Patent: JPS5445611
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