Title:
露光装置および露光方法
Document Type and Number:
Japanese Patent JP5371080
Kind Code:
B2
Abstract:
The invention provides a light exposure apparatus containing a light exposure control device for curing light sensitive adhesives. The light exposure apparatus includes a) a light source; b) a light transmitter for transmitting light from the light source; and c) a light intensity controlling component between the light source and the light transmitter. The light intensity controlling component includes a light regulator (116) having a planar face between the light source and the light transmitter. The light regulator (116) has opaque members (2) having a continuously tapered width, on the face of the light regulator. Each planar member is spaced from adjacent planar members by a light transparent segment (4) having a tapered width, on the face of the light regulator (116). The light regulator (116) is mounted such that a portion of the opaque members (2) and portion of the substantially light transparent segments (4) are adjustably positioned between the light source and the light transmitter.
More Like This:
Inventors:
George Et Leicester
Thomas Jay Cabanot
Kirk A Midremus
Stefan Jay Double Pla Tour
Thomas Jay Cabanot
Kirk A Midremus
Stefan Jay Double Pla Tour
Application Number:
JP2008012362A
Publication Date:
December 18, 2013
Filing Date:
January 23, 2008
Export Citation:
Assignee:
Daimax Corporation
International Classes:
F21V9/40; G02B26/02; G02B26/04; G03F7/20; H01L21/30
Domestic Patent References:
| JP2004062157A | ||||
| JP2006351439A | ||||
| JP2152104A | ||||
| JP2006133432A | ||||
| JP5504847B2 | ||||
| JP2285317A |
Attorney, Agent or Firm:
Patent business corporation Tanaka, Okazaki and Associates