Title:
性能改善された抽出セット
Document Type and Number:
Japanese Patent JP7118516
Kind Code:
B2
Abstract:
An extraction set including an extraction plate, a blocker and the holding mechanism for the blocker is disclosed. The extraction set includes an extraction plate that may be constructed of titanium coated with a ceramic material. The extraction plate is attached to the ion source using pins. The extraction plate also includes raised outline in its inner surface which is used to secure the blocker to the inner surface of the extraction plate. The ends of the blocker are secured by two holders disposed on opposite sides of the extraction aperture. The mechanism used for attaching the extraction plate to the ion source also improves the temperature uniformity of the extraction plate.
Inventors:
Calkins, Adam Moritz
Allen, Ernest E., Junior
Allen, Ernest E., Junior
Application Number:
JP2020551505A
Publication Date:
August 16, 2022
Filing Date:
February 21, 2019
Export Citation:
Assignee:
Varian Semiconductor Equipment Associates, Inc.
International Classes:
H01J37/317; H01J27/02; H01J37/08
Domestic Patent References:
| JP2017533542A |
Foreign References:
| US20160093409 | ||||
| US20170025252 | ||||
| US20180076007 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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