Title:
極端紫外光生成装置
Document Type and Number:
Japanese Patent JP6557661
Kind Code:
B2
Abstract:
A target sensor may include: a plurality of sensor elements, each of the plurality of sensor elements being configured to output a sensor signal that varies in accordance with an amount of light received on a light-receiving surface; and a signal generator configured to process the sensor signals from the plurality of sensor elements. The light-receiving surfaces of the plurality of sensor elements may be disposed at different positions in a second direction different from a first direction along which an image of the target illuminated by the illumination light may move. The signal generator may be configured to compare each of the sensor signals from the plurality of sensor elements with a threshold and output the signal indicating detection of a target to the controller in a case where at least one of the sensor signals from the plurality of sensor elements may exceed the threshold.
Inventors:
Toru Suzuki
Takayuki Yabu
Takayuki Yabu
Application Number:
JP2016535916A
Publication Date:
August 07, 2019
Filing Date:
July 17, 2015
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| JP7103799A | ||||
| JP2006128157A | ||||
| JP2014086523A | ||||
| JP2011003887A | ||||
| JP2005310453A | ||||
| JP2004303725A | ||||
| JP2003114104A |
Foreign References:
| WO2014006193A1 | ||||
| WO2014042003A1 | ||||
| WO2013161760A1 |
Attorney, Agent or Firm:
Fujio Patent Office