FABRICATION OF INK JET PRINT HEAD HAVING INTEGRAL SILICON FILTER

Title:

FABRICATION OF INK JET PRINT HEAD HAVING INTEGRAL SILICON FILTER

Document Type and Number:

Japanese Patent JP3276990

Kind Code:

B2

Abstract:

PURPOSE: To improve the production efficiency of a print head with built-in filter for removing contaminant in ink by dividing an aligned and adhered wafer which comprises two parts to make individual print head.
CONSTITUTION: A print head 10 comprises a channel plate 12 having an integral filter 14 and a heating plate 16, a thick film layer 18 is inserted between the filter 14 and the heating plate 16. Etching is performed at the thick film layer 18 so as to allocate heating elements in the pit and to remove the material between the closed end and storage 24 of the ink channel to connect the channel to the manifold using a fluid. In the filter 14, an etching register material is molded on one side of a silicon wafer, doped by a boron ion embedding, and the assembled wafer and board is sliced to multiple print heads to make channel openings.

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Inventors:

William G. Hawkins
James F O'Neill
Donald J. Drake

Application Number:

JP19566492A

Publication Date:

April 22, 2002

Filing Date:

July 22, 1992

Export Citation:

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Assignee:

Xerox Corporation

International Classes:

B41J2/05; B41J2/16; H01L21/306; (IPC1-7): B41J2/16; B41J2/05

Domestic Patent References:

JP452050U

Attorney, Agent or Firm:

Masashi Kobori

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