Title:
流体センシング装置及び流体センサの故障検出方法
Document Type and Number:
Japanese Patent JP7052958
Kind Code:
B2
Abstract:
To provide a thermal fluid sensing device capable of detecting failure due to adhesion of foreign matter, and to provide a method of detecting failure of a fluid sensor.SOLUTION: A fluid sensing device is provided, comprising: a fluid sensor configured to detect a temperature distribution on a detection surface caused by heating, and output a signal of a level corresponding to a fluid flow; a fall time measurement unit configured to measure fall time of the signal after the heating is stopped; and a failure determination unit configured to perform failure determination based on the fall time.SELECTED DRAWING: Figure 5
Inventors:
Nagatomi Minoru
Tomoyuki Suzuki
Tomoyuki Suzuki
Application Number:
JP2019111469A
Publication Date:
April 12, 2022
Filing Date:
June 14, 2019
Export Citation:
Assignee:
MinebeaMitsumi Co., Ltd.
International Classes:
G01F1/68; G01P5/12; G01P21/02
Domestic Patent References:
| JP4939128B2 | ||||
| JP3718198B2 |
Foreign References:
| US20160169731 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito