Title:
ファンスクラバー、及び、真空ポンプ装置
Document Type and Number:
Japanese Patent JP6461733
Kind Code:
B2
Abstract:
The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.
Inventors:
Takumi Furuta
Tetsuro Sugiura
Tetsuo Komai
Atsushi Oyama
Takashi Kyotani
Shinichi Sekiguchi
Takanori Inada
Tetsuro Sugiura
Tetsuo Komai
Atsushi Oyama
Takashi Kyotani
Shinichi Sekiguchi
Takanori Inada
Application Number:
JP2015135140A
Publication Date:
January 30, 2019
Filing Date:
July 06, 2015
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B01D53/18; B01D47/06; B01D53/78; F04B37/16
Domestic Patent References:
| JP2003251130A | ||||
| JP49089669A | ||||
| JP49031160A | ||||
| JP11089158A | ||||
| JP2013090469A | ||||
| JP2014200735A | ||||
| JP2000024447A | ||||
| JP2012035250A |
Foreign References:
| US20140027528 |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Toru Miyamae
Yukio Kanegae
Koichi Kushida