To air-tightly seal a vacuum cell with high yields by soldering an anode substrate with an external support body.
The FED sensor and a manufacturing method thereof are provided, the method including a cathode substrate 10, an electron emitting source part 14 arranged on the cathode substrate 10, an external support body 20 surrounding the electron emitting source part 14 and arranged on an outer circumference part on the cathode substrate 10, an anode substrate 12 arranged to face to the cathode substrate 10 and having an outer diameter smaller than that of the external support body 20, a photoelectric conversion film 22 arranged on the anode substrate 12 to face to the electron emitting source part 14, a first solder 42 arranged on an outer circumference part of the anode substrate 12, a second solder 40 arranged on the external support body 20, and a third solder 36 arranged between the first solder 42 and the second solder 40. A vacuum between the anode substrate 12 and the cathode substrate 10 is maintained by soldering the first solder 42 with the second solder 40 through the third solder 36.
TERUMOTO KOUJI
Keishin Terayama
Hiroyuki Miyoshi
Ichitaro Ito