FEED OF MIXED GAS, MIXED GAS FEEDING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE PROVIDED WITH THESE

Title:

FEED OF MIXED GAS, MIXED GAS FEEDING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE PROVIDED WITH THESE

Document Type and Number:

Japanese Patent JP3442604

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To prevent a backward flow of each gas from being generated from gas feeding lines of a higher flow rate into gas feeding lines of a lower flow rate by a method wherein the gas of the lowest flow rate among a plurality of the gases is fed through the gas feeding line provided at the longest distance from a gas outlet part.
SOLUTION: In the feed A of mixed gas, the first gas G1 by the lowest flow rate is fed to a gas feeding line L1 separated by the longest distance from a gas outlet part G0 and the nth gas Gn of the highest flow rate is fed to a gas feeding line L which is closest to the part G0. Moreover, the third gas G3 which is fed to a gas feeding line L3 adjacent to the line Ln, which is fed the nth gas Gn, is gas of a flow rate lower than that of the n gas G and the second gas G2. which is fed to a gas feeding line L2 adjacent to the L3, which is fed the third gas G3, is gas of a flow rate lower than that of the gas G3. Thereby, it can be made to nil that the gases of the higher flow rate flow backward or are diffused in the gas of the lowest flow rate.

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Inventors:

Yukio Minami
Shinichi Ikeda
Manoharu, L, Shrestha
Akira Kagazume

Application Number:

JP366797A

Publication Date:

September 02, 2003

Filing Date:

January 13, 1997

Export Citation:

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Assignee:

株式会社フジキン
東京エレクトロン株式会社

International Classes:

B01J4/00; C23C16/44; C23C16/455; F17D1/04; G05D11/13; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; B01J4/00; C23C16/455; H01L21/205

Domestic Patent References:

JP6325914A
JP3106039A
JP7178336A
JP671154A
JP864541A
JP671979U

Attorney, Agent or Firm:

Takeo Sugimoto

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