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Patent Searching and Data


Title:
FEED SCREW
Document Type and Number:
Japanese Patent JPS6435165
Kind Code:
A
Abstract:

PURPOSE: To perform positioning in a short time with a high degree of accuracy by deforming a resilint deformable member between first and second nuts in accordance with an external signal which is produced in response to the movement of a movable member, so that different pressurizing forces and/or directions may be exerted to the nuts.

CONSTITUTION: A subnut 6 is attached to a main nut 4 provided on movable stage 3, through the intermediary of a piezoelectric actuator 8, a pressure sensor 9 and a leaf spring 5, and is screwed onto a feed screw 2. A control circuit 20 receives signals from a pressure sensor 9 and an accelerometer 10, and computes precise positioning data of the movable stage 3 so as to drive a servomotor 1. Further, the control circuit 20 delivers data for controlling at least one of the degree of pressing force between both nuts 4, 6 and the direction thereof in accordance with an inertia force during deceleration, to the acruator 8. Accordingly, it is possible to position the movable stage 3 in a short time with a high degree of accuracy.


Inventors:
HAYASHI YUTAKA
OKADA MASASHI
Application Number:
JP18971387A
Publication Date:
February 06, 1989
Filing Date:
July 29, 1987
Export Citation:
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Assignee:
NIKON CORP
International Classes:
F16H25/20; (IPC1-7): F16H25/20
Attorney, Agent or Firm:
Takao Watanabe