Ferroelectric ceramics and their manufacturing methods - Advanced Material Technologies Co., Ltd.

Title:

Ferroelectric ceramics and their manufacturing methods

Document Type and Number:

Japanese Patent JP6347084

Kind Code:

B2

Abstract:

To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention relates to ferroelectric ceramics including a first Sr(Ti1-xRux)O3 film and a PZT film formed on the first Sr(Ti1-xRux)O3 film, wherein the x satisfies a formula 1 below. 0.01≰x≰0.4 formula 1

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Inventors:

Ken Kijima
Yuji Honda
Koichi Koyama

Application Number:

JP2014028922A

Publication Date:

June 27, 2018

Filing Date:

February 18, 2014

Export Citation:

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Assignee:

Advanced Material Technologies Co., Ltd.

International Classes:

H01L41/047; B32B9/00; B32B18/00; C23C14/08; C23C14/34; H01L41/187; H01L41/29; H01L41/318

Domestic Patent References:

JP2011228178A
JP2011238714A
JP2002164586A
JP2005108876A
JP2011114141A

Foreign References:

US20130240871
WO2011138958A1
WO2005036612A1

Attorney, Agent or Firm:

Mutsumi Yanase
Atsushi Watanabe

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