Title:
強磁性交換結合素子及びその製造方法
Document Type and Number:
Japanese Patent JP7149055
Kind Code:
B2
Abstract:
To provide a ferromagnetic exchange coupling element and a manufacturing method thereof that can realize ferromagnetic exchange coupling with a material without heat resistance with high manufacturing efficiency and can be applied to various fine processing processes.SOLUTION: A ferromagnetic exchange coupling element includes a first ferromagnetic layer made of a ferromagnetic material, a nonmagnetic metal layer formed on the first ferromagnetic layer and made of a nonmagnetic metal, a buffer layer formed on the nonmagnetic metal layer and made of an oxide or a nitride, and a second ferromagnetic layer formed on the buffer layer and made of a ferromagnetic material, and the first ferromagnetic layer and the second ferromagnetic layer are ferromagnetically exchange-coupled.SELECTED DRAWING: Figure 3
Inventors:
Shintaro Aso
Nobuhiko Funabashi
Daisuke Kato
Hidekazu Kaneshiro
Kenichi Aoshima
Kenji Machida
Atsushi Kuga
Hiroshi Kikuchi
Nobuhiko Funabashi
Daisuke Kato
Hidekazu Kaneshiro
Kenichi Aoshima
Kenji Machida
Atsushi Kuga
Hiroshi Kikuchi
Application Number:
JP2017109478A
Publication Date:
October 06, 2022
Filing Date:
June 01, 2017
Export Citation:
Assignee:
Japan Broadcasting Corporation
International Classes:
H01L43/08; G02F1/09; H01F10/16; H01F10/30; H01L29/82; H01L43/10; H01L43/12
Domestic Patent References:
| JP2010219104A | ||||
| JP2013257437A | ||||
| JP2015173186A |
Foreign References:
| US20110064969 |
Attorney, Agent or Firm:
Masayuki Masabayashi
Hayashi Kazuyoshi
Hayashi Kazuyoshi