Title:
強磁性積層膜およびその製造方法ならびに電磁誘導性電子部品
Document Type and Number:
Japanese Patent JP7181064
Kind Code:
B2
Abstract:
To provide a ferromagnetic thin film which can promote the high magnetic permeability to be brought about by a ferromagnetic thin film having a nano granular structure.SOLUTION: A ferromagnetic multilayer film has a structure in which ferromagnetic layers including first ferromagnetic layers 211 and 212 and second ferromagnetic layers 221 and 222, which have respective thicknesses in different thickness ranges are laminated through insulator layers 30. The ferromagnetic layer has a nano granular structure having a composition represented by the general formula, LMF, in which magnetic particles represented by L and having an average particle diameter 1-20 nm are uniformly distributed in an insulative matrix of fluoride of M; L represents one or more elements selected from Fe, Co and Ni (except Ni alone); M represents one or more elements selected from Li, Mg, Al, Ca, Sr, Ba, Gd and Y; and F is fluorine. The insulator layer 30 has a composition represented by the general formula, MF(1≤c≤2 and 1≤d≤3).SELECTED DRAWING: Figure 1
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Inventors:
Masayuki Naoe
Application Number:
JP2018217954A
Publication Date:
November 30, 2022
Filing Date:
November 21, 2018
Export Citation:
Assignee:
Electromagnetic Materials Research Institute
International Classes:
H01F10/16; H01F41/18; H01L29/82; H01L43/00; H01L43/10
Domestic Patent References:
| JP2017041599A | ||||
| JP2007251111A | ||||
| JP2006351563A | ||||
| JP2002158486A |
Attorney, Agent or Firm:
Creation International Patent Office
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