Title:
FIELD EMISSION DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH0817365
Kind Code:
A
Abstract:
PURPOSE: To avoid limiting temperature during degassing without breaking an electron emitting portion by opposing a cathode plate and an anode plate to each other with metallic spacers between them.
CONSTITUTION: Metallic spacers 7 are provided on a cathode plate 1 and at a fixed distance and parallel to gate electrodes 3. The plate 1 is bonded to an opposite plate 8. Insulating spacers 9 are arranged on the plate 8 and between lines where emitter electrodes 2 on the plate 1 are formed, and anodes 10 are arranged on the electrodes 3 of the plate 1. A low melting point glass is usable for the insulating spacers. An organic material such as polyimide may be used if a degassing process at relatively low temperatures is sufficient.
Inventors:
FUKUDA SHINYA
BETSUI KEIICHI
KOSAKA TADAYOSHI
NAKATANI TADASHI
TOYODA OSAMU
BETSUI KEIICHI
KOSAKA TADAYOSHI
NAKATANI TADASHI
TOYODA OSAMU
Application Number:
JP14990994A
Publication Date:
January 19, 1996
Filing Date:
June 30, 1994
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01J9/02; H01J1/30; H01J1/304; H01J5/03; H01J7/18; H01J9/24; H01J29/87; H01J29/94; H01J31/12; H01J31/15; (IPC1-7): H01J31/12; H01J1/30; H01J7/18; H01J9/02; H01J29/94; H01J31/15
Attorney, Agent or Firm:
Shintaro Nogawa
Next Patent: 無線通信システム