Title:
電界放出型電子銃およびそれを用いた電子ビーム応用装置
Document Type and Number:
Japanese Patent JP4317779
Kind Code:
B2
Abstract:
A field-emission electron gun includes a field-emission cathode including a single fiber-like carbon substance and an electrically-conductive substrate for supporting the substance, an extractor for field-emitting electrons, an accelerating electrode for accelerating the electrons, an extracting power-supply for applying extracting voltage to the extractor, an accelerating power-supply for applying accelerating voltage to the accelerating electrode, and a unit for detecting and monitoring a part of emission current. In this field-emission electron gun, if emission-variation amount has become larger than a predetermined value, the extracting voltage is automatically boosted for a constant length of time, thereby increasing the emission current up to a predetermined value. Further, extracting voltage at the time of boosting the extracting voltage, voltage-boosting time, and the emission current are recorded, then being feed-backed to voltage-boosting conditions for the next-time extracting voltage. Moreover, the accelerating voltage is varied in correspondence with the voltage-boosting of the extracting voltage.
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Inventors:
Tadashi Fujieda
Takashi Hidaka
Mitsuo Hayashibara
Takashi Hidaka
Mitsuo Hayashibara
Application Number:
JP2004090806A
Publication Date:
August 19, 2009
Filing Date:
March 26, 2004
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/073; H01J7/24; H01J37/304; H01J37/305
Domestic Patent References:
| JP2004079223A | ||||
| JP2000057934A | ||||
| JP2002208368A | ||||
| JP8167396A | ||||
| JP60117534A |
Attorney, Agent or Firm:
Manabu Inoue