FIELD EMISSION ELEMENT AND ITS MANUFACTURE - MATSUSHITA ELECTRIC IND CO LTD

Title:

FIELD EMISSION ELEMENT AND ITS MANUFACTURE

Document Type and Number:

Japanese Patent JPH08306300

Kind Code:

A

Abstract:

PURPOSE: To realize a field emission element, which can stably emit the electrons for a long time, at a low cost.

CONSTITUTION: A projected part as a basic shape of an emitter 1 is formed in the material, to which the fine working such as Si can be performed, and patterning is performed to this material. A projected part 1a of the tip of the projected part is coated with a DLC film 2, which is mainly composed of carbon having the excellent spattering resistance.

More Like This:

JPS5923607	[Title of the Invention] An X ray target and its manufacturing process
JP2001070867	COATING METHOD AND COATING MATERIAL COMPOSITION USED FOR THE SAME
JPH04160724	MANUFACTURE OF ELECTRODE UNIT

Inventors:

KUROKAWA HIDEO
NAKAGAMI YUICHI
HORI YOSHIKAZU

Application Number:

JP10872295A

Publication Date:

November 22, 1996

Filing Date:

May 02, 1995

Export Citation:

Click for automatic bibliography generation Help

Assignee:

MATSUSHITA ELECTRIC IND CO LTD

International Classes:

H01J9/02; H01J1/30; H01J1/304; (IPC1-7): H01J1/30; H01J9/02

Attorney, Agent or Firm:

Matsumura Hiroshi

Previous Patent: ELECTRONIC SOURCE AND METHOD THEREFOR

Next Patent: DISCHARGE TUBE,ELECTRIC-DISCHARGE LAMP,LOW TEMPERATURED CATHODE AND ITS PREPARATION