To provide an electron source device capable of preventing an electron emission source from being contaminated by barium molecules dispersed from a getter and maintaining high electron emission capability.
The electron source device includes the electron emission source 1 arranged in a first zone surrounded by an upper perimeter device 3 and a base board 2, and the getter 9 arranged in a second zone surrounded by a lower perimeter device 4 and the base board 2. The base board 2 has the getter in the inside of the second zone displaced at a position not crossed with straight lines 14 passing through the through-hole 8 and connecting between the first zone and the second zone, in the field-emission electron source device having the through-hole 8 interconnecting the first zone and the second zone.
KOGA KEISUKE
| JP2005078880A | 2005-03-24 | |||
| JPH04132147A | 1992-05-06 | |||
| JP2006196194A | 2006-07-27 | |||
| JP2001076653A | 2001-03-23 |
Hiroki Naito
Daisuke Nagano
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