PURPOSE: To provide a field emission type transmission electron microscope for achieving both observation of the picture taken by the electron microscope observation at high rightness and the analysis of a very small part.
CONSTITUTION: A low aberration condenser lens 4 is provided on a point farthest from a sample 7, while a short-focal point condenser lens 5 is provided on the intermediate point between the sample 7 and the condenser lens 4. At the time of observation of the picture taken by electron microscope, the condenser lens 4 and the condenser lens 5 are moved interlockingly, and the magnification of the condenser lens serves as an enhancement system. To narrow a spot in the sample 7, the low abberation condenser lens 6 provided near the sample between the condenser lens 5 and the sample 7, is driven, to operate the magnification of the condenser lens by a contraction system. Both of observation of the picture taken by the field emission type transmission electron microscope at high brightness and analysis of elements can be achieved by utilizing both of a small radiation angle and sample radiation with a small spot size.
ICHIHASHI MIKIO
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