Title:
FILAMENT FOR THERMAL ELECTRON EMISSION, QUADRUPOLE MASS SPECTROMETER, AND METHOD FOR ANALYZING RESIDUAL GAS
Document Type and Number:
Japanese Patent JP2017107816
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a filament for thermal electron emission capable of securing long life, and to improve the analysis accuracy of a mass spectrometer that includes the filament for thermal electron emission.SOLUTION: A filament 211 for thermal electron emission includes a core material 211A through which a current flows, and an electron emission layer 211B formed so as to cover the surface of the core material 211A. The electron emission layer 211B has a denseness that substantially blocks gas.SELECTED DRAWING: Figure 3
Inventors:
SASAI KOHEI
IKEYAMA TOSHIHIRO
SAKAI TOSHIAKI
IKEYAMA TOSHIHIRO
SAKAI TOSHIAKI
Application Number:
JP2015242477A
Publication Date:
June 15, 2017
Filing Date:
December 11, 2015
Export Citation:
Assignee:
HORIBA LTD
International Classes:
H01J49/14; H01J1/15; H01J49/42
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Saito Shindai
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