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Patent Searching and Data


Title:
FILM BODY PART REFORMING DEVICE AND FILM BODY PART REFORMING METHOD
Document Type and Number:
Japanese Patent JP2001142094
Kind Code:
A
Abstract:

To provide a film body part reforming device which can easily and efficiently make reforming treatment operation of the film body part to be treated when a large-sized device is manufactured.

This film body part reforming device comprises a light source 10, an optical path moving means 3 which forms a light beam 20 emitted from the light source 10 to a desired shape and orients the shaped light beam 20 to a desired direction and a substrate moving means 1 which is mounted with a substrate 4 including the film body part 2 to be treated and is capable of moving the film body part 2 to be treated so as to make its prescribed part 30 correspondent to the optical path. The film body part reforming device 100 described above is so constituted that the operating accuracy of the optical path moving means 3 is made higher than the operating accuracy of the substrate moving means 1.


Inventors:
TANABE HIROSHI
Application Number:
JP32440299A
Publication Date:
May 25, 2001
Filing Date:
November 15, 1999
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01L21/20; G02F1/13; G02F1/136; G02F1/1365; G02F1/1368; H01L21/268; H01L21/336; H01L29/786; (IPC1-7): G02F1/1365; H01L21/20; H01L21/336; H01L29/786
Attorney, Agent or Firm:
Yasuyuki Hata