Title:
フィルムチャンバの排気方法
Document Type and Number:
Japanese Patent JP6511437
Kind Code:
B2
Abstract:
A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.
Inventors:
Decker Silvio
Dauenhauer Michael
Wetzich Daniel
Bruns Yarmar
Dauenhauer Michael
Wetzich Daniel
Bruns Yarmar
Application Number:
JP2016515472A
Publication Date:
May 15, 2019
Filing Date:
September 15, 2014
Export Citation:
Assignee:
Inficon GmbH
International Classes:
F04B37/16; F04F5/20; F04F5/54
Domestic Patent References:
| JP2003518256A | ||||
| JP9196797A | ||||
| JP2001508536A | ||||
| JP2009534574A | ||||
| JP60024057U | ||||
| JP7325279A | ||||
| JP2014533825A |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko