To from desired films with a good adhesion property on a substrate by forming the intermediate film on the substrate with the good adhesion property and aligning the crystal orientation of the intermediate film and the desired film.
The film-coated substrate is constituted by forming the intermediate film S1 on the substrate S and forming a mixture layer Sm of both at the boundary between both. The adhesion property of the intermediate film S1 and the substrate S is improved by the presence of the mixed layer Sm. The film S2 designed to improve the various characteristics possessed by the substrate and to impart novel characteristics thereto is formed on the intermediate film S1. Since the film S1 and the film S2 are aligned in the internal stresses, the adhesion property between both is good as well. Then, the desired film S2 is eventually formed with the good adhesion property on the substrate S. The intermediate film S1 having the good adhesion property to the substrate S is forcible by an IVD method, etc., using vapor deposition and irradiation with ions in combination. Internal stresses are controlled by adjusting the ion spiced and the energy of the irradiation with the ions.
KURATANI NAOTO
IMAI OSAMU
OGATA KIYOSHI
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