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Patent Searching and Data


Title:
FILM DEPOSITING METHOD
Document Type and Number:
Japanese Patent JP2004250788
Kind Code:
A
Abstract:

To provide a method for uniformly and easily depositing a film having a diffusion-blocking layer on an interface with a base material at low cost.

In the film depositing method, a film comprising a diffusion-blocking layer 3 and a coating layer 4 on a base material 1 is deposited on the surface of the base material 1. The method includes a preliminary oxidizing step of oxidizing the base material 1 to form a base material oxide layer 2, and a coating step of depositing a film comprising the diffusion-blocking layer 3 and the coating layer 4 by coating the surface of the base material with a coating material including at least one alloy or compound containing an element to generate oxide of the generation enthalpy lower than that of oxide of the base material oxide layer 2.


Inventors:
TAWARA TATSUO
SHOBU KAZUHISA
HIRAI HISATOSHI
SAKAMOTO MITSURU
Application Number:
JP2004022125A
Publication Date:
September 09, 2004
Filing Date:
January 29, 2004
Export Citation:
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Assignee:
NAT INST OF ADV IND & TECHNOL
International Classes:
F01D5/28; B22F7/04; C22C27/02; C22C27/04; C23C4/02; C23C4/08; C23C28/00; F02C7/00; (IPC1-7): B22F7/04; C22C27/02; C22C27/04; C23C4/02; C23C4/08; C23C28/00; F01D5/28; F02C7/00
Attorney, Agent or Firm:
Kenzo Hara