FILM DEPOSITION METHOD, DISPLAY DEVICE, AND PRODUCTION METHOD OF DISPLAY DEVICE

Title:

FILM DEPOSITION METHOD, DISPLAY DEVICE, AND PRODUCTION METHOD OF DISPLAY DEVICE

Document Type and Number:

Japanese Patent JP2016145374

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a highly-reliable display device having a simplified production process.SOLUTION: A film deposition method includes steps for: arranging a mask having an opening part in contact with a substrate; depositing a first thin film on the substrate by using the mask; arranging the mask on the substrate with a cavity therebetween; and depositing a third thin film having a wider region than an opening region of the mask on the substrate.SELECTED DRAWING: Figure 1

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Inventors:

WATABE MASAHIRO

Application Number:

JP2015021755A

Publication Date:

August 12, 2016

Filing Date:

February 06, 2015

Export Citation:

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Assignee:

JAPAN DISPLAY INC

International Classes:

C23C16/04; C23C16/50; H01L21/316; H01L21/318; H01L51/50; H05B33/04; H05B33/10

Attorney, Agent or Firm:

Takahashi Hayashi & Partners

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