Title:
Film deposition system
Document Type and Number:
Japanese Patent JP5910797
Kind Code:
B2
Inventors:
Naoya Adachi
Shigeki Yamane
Shigeki Yamane
Application Number:
JP2015535388A
Publication Date:
April 27, 2016
Filing Date:
August 01, 2014
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
C23C14/30; C23C14/24
Domestic Patent References:
JP2000054127A | 2000-02-22 | |||
JP2013104084A | 2013-05-30 | |||
JP2011105966A | 2011-06-02 |
Foreign References:
WO2013014410A1 | 2013-01-31 | |||
WO2013073201A1 | 2013-05-23 |
Attorney, Agent or Firm:
Fukami patent office