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Patent Searching and Data


Title:
Film deposition system
Document Type and Number:
Japanese Patent JP5910797
Kind Code:
B2
Inventors:
Naoya Adachi
Shigeki Yamane
Application Number:
JP2015535388A
Publication Date:
April 27, 2016
Filing Date:
August 01, 2014
Export Citation:
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Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
C23C14/30; C23C14/24
Domestic Patent References:
JP2000054127A2000-02-22
JP2013104084A2013-05-30
JP2011105966A2011-06-02
Foreign References:
WO2013014410A12013-01-31
WO2013073201A12013-05-23
Attorney, Agent or Firm:
Fukami patent office



 
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