Title:
ITO透明導電膜の成膜方法およびITO透明導電膜付きカラーフィルター基板
Document Type and Number:
Japanese Patent JP4693401
Kind Code:
B2
Inventors:
Atsushi Takamatsu
Omoto Hero
Omoto Hero
Application Number:
JP2004356328A
Publication Date:
June 01, 2011
Filing Date:
December 09, 2004
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
H01B13/00; C23C14/08; C23C14/32; G02F1/1335; G02F1/1343; G09F9/30; H01B5/14
Domestic Patent References:
JP2005135687A | ||||
JP2000282225A | ||||
JP2000265259A | ||||
JP10024516A | ||||
JP2004052102A | ||||
JP7078527A | ||||
JP2000038564A |
Attorney, Agent or Firm:
Makoto Koide