Title:
膜形成装置および物品製造方法
Document Type and Number:
Japanese Patent JP7280768
Kind Code:
B2
Abstract:
To provide an advantageous film forming device for improving throughput and/or yield.SOLUTION: The film forming device executes a film forming process including a contact step of bringing a composition on a substrate into contact with a mold, a curing step of curing the composition, and a separation step of separating the cured product of the composition and the mold. The film forming device includes a substrate holding unit for holding the substrate and a deformation mechanism that deforms the substrate by deforming the substrate holding unit at least in an initial stage of the separation step.SELECTED DRAWING: Figure 3
Inventors:
Satoshi Iwatani
Application Number:
JP2019130439A
Publication Date:
May 24, 2023
Filing Date:
July 12, 2019
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2016096327A | ||||
| JP2015133464A | ||||
| JP2016219679A | ||||
| JP2010269580A | ||||
| JP2018163954A | ||||
| JP2007176035A | ||||
| JP2015037087A |
Attorney, Agent or Firm:
Patent Attorney Corporation Otsuka International Patent Office
Previous Patent: rebar binding machine
Next Patent: Holding device manufacturing method and holding device
Next Patent: Holding device manufacturing method and holding device