Title:
FILM-FORMING APPARATUS, FILM-FORMING METHOD, OPTICAL ELEMENT AND PROJECTION ALIGNER
Document Type and Number:
Japanese Patent JP2005097662
Kind Code:
A
Abstract:
To provide a film-forming apparatus which heats a substrate with an adequate time efficiency without deforming a substrate, by controlling the temperature of a heat source optimally for a substrate.
The film-forming apparatus has a substrate temperature-calculating means for calculating a temperature inside the substrate, on the basis of a surface temperature of the substrate.
Inventors:
KOKUBU TAKAO
Application Number:
JP2003331725A
Publication Date:
April 14, 2005
Filing Date:
September 24, 2003
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; C23C14/54; G02B1/11; H01L21/027; (IPC1-7): C23C14/54; G02B1/11; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Takao Watanabe
Keiji Osawa
Keiji Osawa