To provide a film-forming apparatus that can change the position viewed from a substrate, at which a target material is sublimated, and can form a uniform film within a substrate surface, with an easier method than that of moving a reflecting mirror of a laser optical system, when irradiating the target with a laser light in a vacuum chamber, and vapor-depositing a fuel electrode of a solid oxide fuel cell, an electrolyte film, an air electrode or a current-collecting electrode on the substrate to form the film thereon.

This film-forming apparatus includes: the vacuum chamber 1; a target-mounting table 12 which is provided in the vacuum chamber 1 and mounts the target 16 thereon; and a substrate-holding member 13 which is provided in the vacuum chamber 1 and holds the substrate 18. The vacuum chamber 1 includes a laser-light-introducing window 111 which is provided on a side wall of the vacuum chamber 1 and introduces the laser light into the vacuum chamber 1 therethrough. The vacuum chamber 1 is installed so as to be capable of integrally moving the target 16 and the substrate 18, and also to be capable of being reciprocally moved.