To provide a film-forming apparatus with which, in the case of vertically moving a holder for a substrate in a vacuum chamber, the stability of gas-exhaust conductance and gas pressure can be secured and the film quality can be drastically be improved.

In the film-forming apparatus, in which adhesion-proof shields are disposed along the inner wall surface in the vacuum chamber, and also, the holder for the substrate is disposed so as to be vertically movable in the vacuum chamber, the adhesion-proof shields are divided into the upper shield fixed to the inner wall in the vacuum chamber and the lower shield fixed to the movable holder and provided with a turned-up structure at the inner peripheral side of the lower end part. Then, the upper shield and the lower shield are disposed so as to be mutually piled at an interval in the divided portion, and also, on the movable holder, a third adhesion-proof shield positioned at the inner peripheral side of the lower shield is fixed and the lower end side of this third shield and the turned-up structural portion at the lower end part of the lower shield are mutually piled at an interval.