To provide a film-forming composition excellent in storage stability, capable of imparting a film excellent in dielectric constant characteristics and useful as an interlayer insulating film in semiconductor elements, etc.
This film-forming composition comprises (A) at least one kind selected from the group consisting of silane compounds of R2R3R4Si(OR1), R2R3Si(OR1)2, R2Si(OR1)3, Si(OR1)4, and R2s(OR1)3-sSiRSi(OR1)3-tR2t (wherein R1 to R4 are each a monovalent organic group; R is a divalent organic group; s and t are each an integer of 0 to 1) or its hydrolyzate and/or condensation product, (B) at least one organic polymer selected from the group of a polyether, a polyester, a polycarbonate and a polyanhydride and (C) an alcohol-based solvent and/or a ketone-based solvent.
| JP6262655 | A viscous constituent |
| WO/2008/156410 | POLYMER TWO PHASE SYSTEM AND USE THEREOF |
| WO/1997/016490 | USE OF POLY(METH)ACRYLIC ACIDS AS BRANCHING AGENTS |
SHIODA ATSUSHI
YAMADA KINJI
