To provide such an optical detection device capable of improving a real-time property by suppressing a deterioration in an S/N ratio (signal/noise ratio) during measurement and performing accurate measurement by measurement in a short period of time.
The optical detection device has a measurement optical path through which measuring light passes, a light source for irradiating the measurement optical path with the measuring light, and a detector for receiving the light passing through the measurement optical path and detecting an absorption spectrum. The optical detection device is provided with a first connection path for connecting the measurement optical path and the light source, and a second connection path for connecting the measurement optical path and the detector with a predetermined interval. The first connection path is configured to be able to seal space between the measurement optical path and the light source, and the second connection path is configured to be able to seal space between the measurement optical path and the detector. The optical detection device includes an exhaust mechanism for exhausting the insides of the first connection path and the second connection path, and an inactive gas supply mechanism for supplying inactive gas to the insides of the first connection path and the second connection path.
HAYASHI TERUYUKI
ISHIKAWA HIROSHI
KANEKO HIROYOSHI
Tetsuo Kanamoto
Miaki Kametani