To suppress the generation of heat defeat (micro-deformation) caused by an arc and to attain the stabilization and speeding-up of film formation.
At the time of forming a carbon protective film on a magnetic layer of a magnetic recording medium 1 by a CVD method, before and after the film formation, the magnetic recording medium is irradiated with electrons. The amt. of the electrons to be irradiated is controlled to 90 to 110% of the total electric current to be fed to a reaction tube 5 at the time of forming the carbon protective film. The film forming device is composed of a reaction tube forming a carbon protective film by a CVD method and cylindrical counter electrodes in which the magnetic recording medium in which the magnetic layer has been formed is made run along the surfaces, and, oppositely to the magnetic recording medium running before and after the reaction tube, electron feeding devices 8 are provided. In the case guide rollers 11 guiding the running of the magnetic recording medium are installed to the places before and after the counter electrodes, the guide rollers have insulating structure.
| JP2001076330 | MAGNETIC RECORDING MEDIUM AND ITS PRODUCTION |
| JPS5671829 | MANUFACTURE FOR MAGNETIC RECORDING MEDIUM |
KAWAKAMI KIKUJI
EBINE YOSHITO
KIN YASUNORI
KOJIKA YUKIHIRO
