Title:
FILM FORMING METHOD FOR PLASMA DISPLAY PANEL, AND FILM FORMING EQUIPMENT FOR PLASMA DISPLAY PANEL
Document Type and Number:
Japanese Patent JP2002056773
Kind Code:
A
Abstract:
To enable to form a metal oxide film excellent in crystalline and minute nature, in case one is formed on a substrate for PDP including an MgO overcoat, and to aim at improvement in luminous efficiency of PDP, reduction of drive voltage, and long-life of PDP.
A 1st thin film 210a is formed on a substrate 200 by depositing MgO at a 1st evaporation room 20. At an annealing processing room 30, an annealing processing is performed to the 1st thin film 210a by irradiating laser beam 33a on the 1st thin film 210a by driving a laser irradiating equipment 33. Next, MgO is deposited on the 1st thin film 210a at a 2nd evaporation room 40.
Inventors:
YASUI HIDEAKI
SUGIMOTO KAZUHIKO
HASEGAWA KAZUYUKI
TANAKA HIROYOSHI
SUGIMOTO KAZUHIKO
HASEGAWA KAZUYUKI
TANAKA HIROYOSHI
Application Number:
JP2000240151A
Publication Date:
February 22, 2002
Filing Date:
August 08, 2000
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C14/08; C23C14/58; H01J9/02; H01J11/22; H01J11/34; H01J11/40; (IPC1-7): H01J9/02; C23C14/08; C23C14/58; H01J11/02
Attorney, Agent or Firm:
Shiro Nakajima (1 person outside)
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