Title:
薄膜製造装置に於ける膜厚分布制御方法及びその装置
Document Type and Number:
Japanese Patent JP4521606
Kind Code:
B2
Inventors:
Keiji Takahashi
Tatsushi Ishigami
Ichiro Aoki
Tatsushi Ishigami
Ichiro Aoki
Application Number:
JP2000052667A
Publication Date:
August 11, 2010
Filing Date:
February 29, 2000
Export Citation:
Assignee:
Showa Vacuum Co., Ltd.
International Classes:
C23C14/54; C23C16/44; C23C16/52; H01L21/285
Domestic Patent References:
| JP1056141B2 | ||||
| JP4329876A | ||||
| JP7224377A | ||||
| JP61161708A |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Tadashi Hanamura
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Tadashi Hanamura