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Patent Searching and Data


Title:
FILM THICKNESS MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH11344314
Kind Code:
A
Abstract:

To provide a film thickness measuring device capable of measuring the thickness of a thin film on a substrate during the production process of indication element and the like.

A light radiation means 3 radiating light to a thin film 2 on a substrate 1, an observation wavelength forming means 7 forming an observation wavelength from the light having passed the thin film 2, a light intensity detection means 6 detecting the light intensity of a specific wavelength formed by the observation wavelength forming means 7, and a film thickness detection means 9 detecting the film thickness of the thin film based on the light intensity detected by the light intensity detection means 6 are provided. Light is cast on the thin film 2 on the substrate 1 with the light radiation means 3, a specific observation wavelength only is selected from the light having passed the thin film 2 with the observation wavelength forming means 7, the light intensity of the specific wavelength is detected with the light intensity detection means 6 and based on the light intensity, the film thickness of the thin film is detected with the film thickness detection means 9.


Inventors:
HOSHINO HIROSHI
Application Number:
JP14965198A
Publication Date:
December 14, 1999
Filing Date:
May 29, 1998
Export Citation:
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Assignee:
OPTREX KK
International Classes:
G01B11/06; H01L21/66; (IPC1-7): G01B11/06; H01L21/66
Attorney, Agent or Firm:
Shunsuke Nakao (2 outside)