Title:
FINE CAPACITOR, SEMICONDUCTOR DEVICE PROVIDED THEREWITH, AND MANUFACTURE THE DEVICE
Document Type and Number:
Japanese Patent JPH06112476
Kind Code:
A
Abstract:
PURPOSE: To provide both a finer capacitor stable and high in reliability and a semiconductor device provided therewith.
CONSTITUTION: A channel fine line 4 is formed through the intermediary of a barrier layer 5 traversing the end face of a semiconductor channel layer 1, and a fine capacitor 6 formed of a tunnel junction of fine area is provided at an intersection.
Inventors:
UGAJIN RYUICHI
Application Number:
JP25856892A
Publication Date:
April 22, 1994
Filing Date:
September 28, 1992
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L27/04; H01L21/822; H01L29/68; (IPC1-7): H01L29/68; H01L27/04
Attorney, Agent or Firm:
Hidekuma Matsukuma