Title:
マイクロカラムを用いた微細パターンおよび形状検査装置
Document Type and Number:
Japanese Patent JP5362355
Kind Code:
B2
Abstract:
Inspection equipment using a microcolumn is disclosed. The inspection equipment of the present invention can conduct inspection of a fine circuit, which could not be conducted using conventional optical inspection equipment. Furthermore, the present invention can rapidly inspect a display, having a relatively large area, and can have a precise inspection function and a repair function. The inspection equipment of the present invention includes a plurality of microcolumns, a shaft, to which the microcolumns are coupled, and which is disposed in a direction perpendicular to a direction in which an object is moved, and a detector for detecting electron beams radiated from the microcolumns onto the object to determine whether errors exist in a circuit of the object.
Inventors:
Kim hoseobu
Application Number:
JP2008523810A
Publication Date:
December 11, 2013
Filing Date:
July 31, 2006
Export Citation:
Assignee:
CEBT CO., LTD.
International Classes:
G01N23/225; G02F1/13; G09F9/00; H01J9/42; H01J11/10; H01L21/66
Domestic Patent References:
| JP2001056306A | ||||
| JP2002543439A | ||||
| JP2000514238A | ||||
| JP6111745A | ||||
| JP56037626A | ||||
| JP2005332888A | ||||
| JP4276509A | ||||
| JP2003217499A | ||||
| JP2005062148A | ||||
| JP5159735A | ||||
| JP11330186A |
Foreign References:
| WO2004059690A1 |
Attorney, Agent or Firm:
Takahiro Ozaki